Center for Electron Microscopy and Microanalysis
In Association with:

Zeiss ORION NanoFab Scanning Ion Microscope

Images or Results

The ORION NanoFab uses a ion beam to achieve imaging with both conductive and non-conductive samples with the use of a electron flood gun for charge compensation. A higher depth of field compared to images acquired with FE-SEMs and greater surface sensitivity. A gas injection system (GIS) with the Fibics Nanopatterning and Visualization Engine (NPVE) is attached for lithography.

Room No :
CEM 104

Primary Contact :
John Curulli
curulli at usc dot edu

Secondary Contact :

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